用于探针存储系统的硅微静电驱动器的分析

Analysis of Micro Electrostatic Actuator Applying for Phase Change Probe-based Data Storage System

静电驱动的微XY平台、微探针阵列及具有超高密度存储功能的记录介质相结合的高密度数据存储技术是目前的研究热点。该文提出并设计了用于相变探针存储系统的微型静电驱动器,其具有面积为12 mm×12 mm的中央XY平台和100μm的静态位移,平台上相变存储介质的面积定为6.4 mm×6.4 mm,考虑分析了该驱动器的可靠性及机械干涉问题。分析表明,所设计的静电微驱动器的结构合理,各项参数可行,可满足相变探针存储系统的要求。

The high-density data storage technology including the micro XY stage and micro probe arrays as well as the data storage medium with super high storage function has become the focus of research. A micro electrostatic actuator applied to the phase change probe-based data storage system has been designed. The actuator composed of a central XY stage with an area of 12 mm× 12 mm,the static placement of the actuator is 100μm and the area of the storage medium is 6.4 mm×6.4 mm. The reliability and the mechanical cross-talk are considered. The analytical results indicate that the actuator has proper construction and all the parameters are feasible, thus it cam meet the needs of the phase change probe-based data storage system.