晶圆制造中单臂Cluster tool的建模与仿真

Modeling and Simulation of Single-arm Cluster Tool in Wafer Fabrication

对于单臂的Cluster tool,由于晶圆驻留时间的约束和作业时间的波动性,还没有解析的方法能够验证其调度的可行性和有效的调度方法。介绍了晶圆制造过程并基于Petri网模型,利用eM-Plant仿真平台建立了相应的晶圆制造的仿真模型。通过实例说明仿真模型能够虚拟单臂的Cluster tool、准确地仿真单臂的Cluster tool的晶圆制造模式;晶圆制造的仿真模型为研究其调度可行性分析和控制器设计提供了一种有效的手段。

With wafer residency constraint and activity time variation, schedule feasibility for single-arm cluster tools is an important issue. Up to now, the schedulability problem for such system is still open. Based on a Petri net model, a simulation model was developed by using eM-Plant. The model can exactly simulate the process for any flow pattern just as a virtual single-arm cluster tool. Thus, by this model, schedule feasibility and schedulability can be checked.