利用离子束辅助沉积技术在GCr15钢基上生成TiC_xN_y膜的研究

STUDY OF TiCxNy FILMS DEPOSITED BY ION BEAM ASSIST ON GCr15 STEEL

用离子束辅助沉积技术在ＧＣｒ１５钢基体上形成了ＴｉＣｘＮｙ膜．ＴＥＭ观察揭示，膜呈多晶结构，具有（１１１），（２００）和（２２０）择优取向．ＡＥＳ和ＸＰＳ分析进一步证实，ＴｉＣｘＮｙ膜呈含氧配置．膜的硬度和摩擦特性与Ｎ含量有关，Ｎ的过高含量对提高表面硬度不明显，但摩擦特性明显下降．在作者的实验条件下，以３×１０１７／ｃｍ２的注量为宜．干摩擦表明，膜的抗氧化性能优良．不仅存在能有效地抑制基体在摩擦过程中形成的氧化皮，又由于硬度高，润滑性良好，还能显著地改善基体的耐磨粒磨损特性．

TiCxNy films were formed on GCr15 steel matrix using ion beam assisted deposition.TEM revealed the films to be a polycrystalline structure with (111),(200) and (220) prefered orientation.TiCXNY films containing oxygen coordinationwere further confirmed by AES and XPS.Microhardness and friction properties of the films were relative to its N content.Increase of microhardness isn′t obvious but the friction properties becomes poor as a excessively high N content,and an assisted pouring quantity of 3×1017/cm2 is optimum in this experiment.The dry friction test indicated that oxidation resisance of the films is excellent,oxidation of the steel matrix in the friction pross obviously can be inhibited.At the same time,the wear resistance of matrix was improved because of high hardness and excellent lubriction of the films.