双兰杰文式定子驱动的大推力直线平台的设计

Design of a Powerful Linear Stage Driven by Two Langevin Type Stators

利用圆柱状弹性体的一阶纵振和二阶弯振模态设计出一种兰杰文式定子,用两个定子并联驱动一个精密直线平台,该平台的尺寸为250mm×250mm×49mm,有效行程为120mm。研究了两定子的并联同时驱动和差分异步驱动的平台驱动方式,设计了平台的驱动电路。通过对定子的扫频实验和模态修正,实现了定子的纵振、弯振模态频率的一致性,并使两个定子的幅频和相频特性也分别趋于一致,从而保证了两个定子驱动足能对平台进行协调驱动,使平台的最大输出推力达23N,空载时的最大速度可达65mm/s。

A type of Langevin stator using the cylinder＇s 2nd order bending mode and the 1st order longitudinal mode was proposed. A stage driven by two such stators arranged in parallel was implemented. The stage is of the size 250mm×250mm×49mm and the route100mm. Two drive modes for the feet on the stage＇s stator, the synchronous drive mode and the asynchronous drive mode, were presented. A driving circuit used to excite the stators＇ work modes has been designed. Frequency sweeping experiments have been done to make the stator＇s 2nd order bending mode frequency approach to its 1st order longitudinal mode frequency. Mode experiments have been done to make the two stators be of the same amplitude--frequency and phase--frequency characteristics to guarantee the feet on the stage＇s stators being able to act as it is desired. It is shown by experiment that the stages＇ export power amounts 23N and its work speed can reach 65mm/s.