铝电解电容器用腐蚀箔的SEM与EBSD研究

Study on etched Al foil for electrolytic capacitor via scanning electron microscope and electron backscatter diffraction

采用扫描电子显微镜(SEM)和背散射电子衍射(EBSD)技术分析国产铝光箔与进口铝光箔的表面质量、晶粒大小和织构度对阳极氧化腐蚀箔比容的影响。结果表明,由于光箔轧制与再结晶退火工艺的原因,国产铝光箔表面缺陷多,粗糙度大,晶粒小和织构度低,在相同腐蚀条件下,腐蚀箔的比容比进口铝光箔腐蚀后的比容低,且幅度超过5%。

The effect of anodic oxide foil＇s specific volume by the homemade and the imported Al foil sureface mass, grain size and texture ratio was studied via scanning electron microscope（SEM） and electron baekscatter diffraetion（EBSD）. Experimental results indicate the homemade AI foil has more surface disfigurement, more roughness, smaller grain and lower texture ratio. This can be attributed to the results of the AI foil＇s rolling, reerystallization and anneal technique. In the same conditions, it＇s specific volume is lower than that of the imported AI foil, and the ratio is over 5 % .