摘要
1967年Dyment等人利用Ⅱα型天然金刚石制备出了用于GaAs半导体激光二极管散热用的金刚石热沉,并用该热沉首次实现了这一激光二极管的室温连续工作。但是由于受到制备成本的限制,利用天然及高压合成金刚石制备的热沉一直没有得到推广应用。 本文用灯丝热解CVD方法,合成了厚度为100μm的金刚石多晶薄膜。
Polycrystalline diamond films above 100 μm in thickness were synthesized using thermal chemical vapor deposition method of tungsten filament. Diamond film heat sinks were carried out by metallizing the surface of the films. The maximum light output power of GaAs/AlGaAs laser diode array installed on the vapor growth diamond film heat sinks was increased by 10% compared with that of GaAs/AlGaAs laser diode array installed on conventional copper heat sinks.
出处
《吉林大学自然科学学报》
CAS
CSCD
1990年第3期75-76,共2页
Acta Scientiarum Naturalium Universitatis Jilinensis
关键词
金刚石薄膜
半导体激光器
热沉
diamond films, thermal chemical vapor deposition (CVD) method, heat sinks, semiconductor laser diode array
