三种单体在等离子体中的化学反应

Chemical Reaction of Three Kinds of Monomers in Radio Frequency Plasma

本文对三种有机单体(MMA,MIB,VAC)等离子态下的反应产物进行了收集和分析。GC-MS测试表明产物由多种物种组成,ESR测试发现凝聚产物中有自由基存在。由产物分析推断了单体在等离子态下经历的反应历程。

Products of three kinds of monomers (MMA, MIB, VAC) reacting in radio frequency plasma were collected and analysed. The results of analysis with GC-MS and ESR show that the products consist of many compounds and some free radicals. The reaction process of monomers in plasma showed that the monomers were broken to free radical pieces in plasma, then these pieces recombined into the products.