RHEED在计算Al_2O_3晶面间距中的应用

Application of RHEED in the Calculation of Al_2O_3 Interplanar Distance

反射式高能电子衍射仪(RHEED)是一种表面分析工具,以往都是用来对晶体进行定性观察,以研究晶体的结晶状况,很少用来进行晶体结构的定量计算。在分析RHEED的工作原理的基础上,研究了Al2O3衍射条纹宽度、电子束入射方向和晶面方向之间的关系,并尝试利用RHEED来分析和计算Al2O3(0001)面上两个重要方向上的晶面间距,得到了理想的结果。由于RHEED是一种原位监测仪器,所以可对薄膜的生长进行实时原位监测。在测晶面间距等常数时,与对样品要求极高的透射电子显微镜相比,RHEED更方便。

Reflection high-energy electron diffraction （RHEED） is one of the instruments which can exam the surface of the material sensitively. RHEED was used as a tool of qualitative analysis but seldom used as quantitative analysis in crystal materials. Operating principle of RHEED was illustrated and the relationship among the width of diffraction fringe of Al2O3, the direction of electron beam incidence and indices of crystallographic plane was studied. The interplanar distance of two important directions in （0001） plane of Al2O3 was analyzed and calculated and desired results were obtained. This shows that RHEED can be used to analyze crystal structure precisely. As RHEED can monitor films in situ, it is more convenient than transmission electron microscope which has a strict request with samples in measurement of crystal constant.