摘要
在迁移率谱分析技术中,除了真实反映材料中载流子信息的峰之外,有时还会出现一些没有物理意义的多余峰,即所谓的"映像峰"。这会给实验结果的分析造成一定的假象,甚至会导致错误的结论。分析了迁移率谱技术中"映像峰"出现的原因,利用LEI1610迁移率分析系统研究得出载流子的迁移率随着外加磁场的变化而变化是造成"映像峰"的根本原因,并通过合理的选择测试磁场消除了"映像峰",使测试结果更加真实可靠。
In the mobility spectrum analysis, extra peaks without any physical interpretation will appear and lead to artifacts even false conclusions sometimes, generally referred to as "mirror peaks". The reasons of the appearance of "mirror peaks" in mobility spectrum analysis were presented. Using the LEI1610 mobility spectrum analysis system, it is found that the change of carrier mobility with the variable magnetic field is the main reason of appearance of "mirror peaks". Optimizing the magnetic field leads to the disappearance of the "minor peaks" and more reliable results.
出处
《半导体技术》
CAS
CSCD
北大核心
2009年第1期76-78,共3页
Semiconductor Technology
关键词
迁移率谱
映像峰
可翻转磁场
mobility spectrum
minor peaks
reversible magnetic field