高温氧化扩散炉温控系统设计

Temperature Control System for High Temperature Oxidation Diffusion Furnace

针对半导体行业高温氧化扩散炉设备设计、实现了一套炉温控制软硬件系统。硬件系统由多路开关、温度变送器、工控机、信号输入输出板卡组成。在此硬件基础上根据工艺要求设计控温软件的结构与算法,改进了PID参数整定算法,引入了轨迹规划算法,完成了多段炉体的控温、斜变升温、PID参数整定和自动温区分布。实验表明,在此系统控制下,炉体能够达到高温氧化扩散工艺的需求,并且系统的扩展性、稳定性、精确性等方面得到了提高。此温度控制系统已经应用于工业用高温氧化扩散炉设备。

A hardware and software system for a high temperature oxidation diffusion furnace based on the technical demand was introduced. The hardware system was composed by a multi-channel switch, an industrial computer, a temperature transmitter, and I/O cards. Based on this hardware system the algorithm of the PID tuning was improved, and the trajectory planning algorithm was introduced. Finally, this system functions were fulfilled of the control, ramp, PID auto-tuning and automatic temperature distribution. The experiments show that this system achieves the technical requirement for oxidation diffusion and the system augment ability, stability and precision are improved. This system is already applied in high temperature oxidation diffusion furnace.