摘要
设计了一种用于MEMS电容传感器的低噪声低失调全差分运算放大器。微传感器传感电容一般很小,传感电容的变化更小。低噪声低失调放大器大大提高了整个传感器检测电路精度。该放大器采用连续时间共模反馈方法稳定共模输出、低阻结点斩波和动态匹配方法以期达到有稳定输出的低噪声低失调全差分放大器,给出基于HJTC 0.18μm CMOS 1P6M工艺的仿真结果,经过精心设计,各项指标达到或超过应用要求。
A low noise low offset full differential amplifier for MEMS capacitor sensor was presented. The capacitor of the micro-sensor is always very small, and the change of the sensor capacitor is much smaller. So this amplifier can help the whole detecting-circuit behave much better. Continue-time CMFB circuit is used for stabilizing the common mode voltage of the amplifier, low noise and offset are achieved by using a chopper and dynamic element matching. The simulating result based on HJTC 0. 18 μm CMOS 1P6M technology is supplied and the results reach or beyond the demand.
出处
《半导体技术》
CAS
CSCD
北大核心
2009年第2期181-184,192,共5页
Semiconductor Technology
基金
国家自然基金资助项目(60574093,50534050)
