电化学还原方法制备锆钛酸铅薄膜的研究

Preparation of the Perovskite Structure PZT Films With Electrochemical Reduction

以Pb（NO3）2、TiCl3和ZrOCl2为电解质，就利用电化学还原法及退火晶化处理在不锈钢基底上制备钙钛矿型PZT薄膜进行了研究。结果表明：在一定条件下，淀积在基底上的膜层，其组份比与电解液的组份摩尔浓度、还原电流密度和还原时间存在某种确定的关系。通过调整电解液中组份的摩尔浓度，选择合适的还原电流密度和还原时间，可以控制膜层的组份比，再经过退火处理制备出所需化学配比的钙钛矿结构PZT薄膜。

The experimental study of lead zirconate-titanate (PZT) ferroelectric thin films prepared by means of the electrochemical reduction has been made,using Pb(NO3)2,TiCl3 and ZrOCl2 as the electrolytes. The results indicate that there is a certain relationship between the ratio of compositions for the film deposited and the molar concentration of electrolytic solution, reductive current density, reductive time. It is practicable to use the electrochemical reduction to prepare PZT film.