微型触觉传感器敏感单元的力学分析

Mechanics Analysis of the Sensitive Cell of Micro-Tactile Sensor

通过对微型触觉传感器敏感单元的理论和有限元（ＦＥＭ）分析的对比，得出了Ｅ型方膜结构类型传感器的静态特性（变形、应力等）和动态特性（固有频率、振型等）。并讨论了静态和动态特性对结构的敏感性。

By means of comparative analysis between theories and finite element method(FEM) of the sensitive cell of micro-tactile sensor, the static and dynamic properties(such as stress, natural frequencies, model etc.) of E-type squarediaphragm for sensors are presented. Their sensitivities to structure is also discussed. These can provide bases and supports for optimum design of this kind of sensors.