摘要
以醋酸锶、醋酸钡和钛酸四丁酯为前驱体原料,配制了不同浓度(0.05mol/L、0.1mol/L、0.3mol/L、0.4mol/L、0.5mol/L)的Ba_(0.65)Sr_(0.35)TiO_3溶胶,采用溶胶-凝胶(Sol- Gel)和旋涂工艺,成功制备了BST薄膜。采用XRD、SEM和阻抗分析仪研究分析了前驱液浓度对BST薄膜的结晶、微观形貌和性能的影响。结果表明,在相同热处理温度下,随着前驱液浓度增加,薄膜的结晶程度、晶粒生长情况和介电常数依次提高,介电损耗降低。浓度为0.5mol/l的溶胶形成的薄膜的结晶程度较好;晶粒发育完善,晶粒与晶粒之间比较紧密,表面光滑致密无裂纹,颗粒尺寸约为60nm～80nm;且其介电性能最佳。
A series of BST （Ba0.6~Sr0.35Ti03） sol with different concentration were prepared by us- ing barium acetates [Ba（CH3COOH）2], strontium acetates [Sr（CH3COOH）2] and titanium-tetrabutoxide [Ti（OC4H9）4] as raw materials and some BST thin films were fabricated in Sol-Gel and spin-coating processes successfully. The effect of sol concentration on the properties and microstructures of the BST thin films were analyzed in detail by using a X-ray diffractometer, a scanning electron microscope and an impendance phase analyzer respectively. The results show that at the same annealing temperature, the crystallization degree, grain growth and dielectric constant of the films become better and the dielectric loss decreases with the increase of the concentration of the precursor solution. The film formed by the sol with a concentration of 0.5mol/1 has a better crystallization degree. Its grains grew well and were ranged very compactly. The grain size is about 60nm to 80nm. Their dielectric properties are optimal.
出处
《红外》
CAS
2009年第2期5-9,共5页
Infrared
基金
山东省自然科学基金(编号Y2005F06)
