空间用宽截止长波红外带通滤光片的设计与镀制

Design and Preparation of Infrared Pass-band Filters with Wide Rejection Band for Space Use

针对空间用宽截止长波红外带通滤光片具有通带内平均透射率高、抑制带截止深度深、波纹系数小、可适应复杂环境条件、具有高稳定性和高可靠性等特点,论述了宽截止长波红外带通滤光片的设计原则和方法。采用"会聚光红外光学系统"和等离子体辅助沉积工艺成功镀制了空间用宽截止长波红外带通滤光片。指出等离子体辅助沉积工艺更有利于长波红外滤光片膜层的显微结构改善和残余应力的消除。

According to the features of high transmittance in pass-bands, high reflectance in rejection bands, small ripple coefficient, high adaptability to complicated environment, high stability and high reliability of wide cutoff long wavelength infrared band-pass filters, the design principle and method of the wide cutoff long wavelength infrared band-pass filter is discussed. Some wide cutoff long wavelength infrared band-pass filters are coated successfully by using a convergent infrared optical system and a plasma assistant deposition technology. It is pointed out that the plasma assistant deposition technology is more favorable to the improvement of microstructure and the elimination of residual stress for long wavelength infrared filters.