微处理器在微区薄层电阻测试Mapping技术中的应用

Measurement Mapping Technique of Sheet Resistance for Microarea Using Microprocessor

利用微区薄层电阻测试的一种斜置四探针新方法，将扩散微区薄层电阻测试结果绘成全片的灰度图，这种Ｍａｐｐｉｎｇ技术十分有利于评价材料的质量。在测试过程中应用微处理器，可立即数字显示相应的测量电压及微区的薄层电阻，加快了计算速度并有利于控制探针的合适位置。

A new microarea inclined four probe technique is used for measuring sheet resistance.Its distribution is shown with the grey scale.This mapping technique is more suitable to assess material quality.In the measurement process,we adopted a microprocessor to pick up the measured voltages and to show the digital values of them respectively,finally to turn into the digital sheet resistance.Thus,that speeds up calculating processes and is advantageous to control the proper positions of the probes.