LICVD制备纳米SiO_2粉末工艺研究

Study on the preparation techniques of nanometre sized SiO 2 powder through laser induced chemical vapor deposition method

对ＬＩＣＶＤ制备纳米ＳｉＯ２粉末工艺作了理论分析，探索了工艺参数与粒子特征的关系，并且利用正交装置成功地制备出纳米ＳｉＯ２粉末。

The preparation technique of nanometre sized SiO 2 powder through LICVD method is studied theoretically.The relation of the technique parameters and the characteristics of the nanometre sized SiO 2 powder is discussed.The nanometre sized SiO 2 powder is gained successfully.