CCD用于光学三角法测量金属板厚

CCD for optical triangle method to measure the depth of metal plate

利用激光束斜入射到金属板上，再用透镜将激光金属板上的激光光斑成像到ＣＣＤ上，当金属板发生位移时，ＣＣＤ上激光光斑的像也将发生位移。通过对光班像位移的测量，就可计算出金属板的位移量。此法也可推广到金属板的厚度测量中。由于金属板表面反射率变化会对测量带来影响，我们已考虑到对此作了修正。此测量方法不但是无接触的，可不受测量对象、不利环境对传感头的影响。故可用于生产过程进行实时监测。

The laser spot of the oblique incidence to metal plate can be imaged on CCD by use of lens.While the metal plate moving,the image of spot will take place displacement.By measurement the displacement of image,the metal plate displacement can be calculated.This method can be also applied to measure the depth of metal plate.Although the variation of reflectance of metal surface may influence measuring results,but it can be correct.The method is no contact and the sensor isn′t influenced by measuring object and environment,so it can be used for realtime measurement.