等离子增强磁控溅射Ti–Si–C–N基纳米复合膜层耐冲蚀性能研究

Ti–Si–C–N Based Nanocomposite Coatings Produced by Plasma Enhanced Magnetron Sputter Deposition and its Erosion Resistance

介绍了等离子增强磁控溅射(PEMS)技术,系统研究了其制备的Ti–Si–C–N纳米复合膜层。首先讨论该技术工作原理,并描述了膜层的制备工艺过程。通过SEM、XRD、EDS、纳米压痕、微米压痕及冲蚀试验等研究了膜层性能,发现膜层为纳米复合结构,以非晶SiCxNy为基质内含4.7～30nm的TiC0.3N0.7纳米晶。膜层硬度高达40GPa,同时研究了Si含量的影响。膜层表现出的耐冲蚀性比基体材料高100倍以上,其韧性对耐冲蚀性影响很大。讨论了溅射工艺参数对膜层微观组织结构、纳米硬度、附着力及耐冲蚀性方面的影响,同时研究了多层膜层。此类膜层有望应用于气轮压缩机及固定式涡轮的严重固体颗粒冲蚀(SPE)和液滴浸蚀(LDE)的防护。

This paper presents a plasma enhanced magnetron sputtering （PEMS） technology, by which Ti-Si-C-N nanocomposite coatings are systematically studied. The PEMS principle is first discussed. Then the paper describes the tisicn coating preparation process. These coatings were studied using various techniques including SEM, XRD, EDS nanoindentation, microindentation, and erosion testing. The coatings are found to be nanocomposite coatings composed of nanocrystalline TiC0.3N0.7 with grain sizes of 4.7-30 nm in a matrix of amorphous SiCxNy. Their hardness ranges up to 40 GPa. The effect of Si content was also studied. These coatings exhibit erosion resistance over 100 times better than the uncoated substrate materials. It has been observed that the toughness of the coating significantly influences the coating erosion resistance. The effect of processing parameters relationship on the coating microstructure, nanohardness, adhesion, and erosion resistance are discussed. Multilayered coatings have also been studied. These coatings are intended to be used against severe solid particle erosion （SPE） and liquid droplet erosion （LDE） for gas turbine compressors and land-based turbines.