确定KrF激光光束品质的光楔法

An Optical Wedge Method for Determination of KrF Laser Beam Quality

运用光楔对发散角较大、光束品质不够好的ＫｒＦ激光光束进行了分光测量，测量了ＫｒＦ激光光束的一维能量分布和远场发散角；具体计算了ＫｒＦ激光光束剖面的能量密度分布的均匀性。

The optical wedges are designed for the measurement of the vacuum ultraviolet laser beam with a large divergence angle and not so good beam quality. Two wedges have been made and constructed, then applied for splitting and measuring a KrF laser beam. Treatment for experimental data obtained has two ways which constitute a complete description of the KrF laser beam: after drawing a one dimensional energy distribution graph of the laser beam we measured the far field divergence angle;then we calculated the uniformity of energy distribution of the KrF laser beam cross section, for this goal, an analysing program has been developed on the bases of the image analyser Magiscan (2).