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溶胶-凝胶法制备锆钛酸钡薄膜的研究

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摘要 采用溶胶-凝胶法(sol-gel)法在Pt/Ti/SiO2/Si衬底上制备了BaZr0.25Ti0.75O3,(简称BZT)薄膜。对其先体溶液进行了差热与热失重曲线(TG-DTA)分析,并以此来确定了薄膜的热处理工艺。X射线衍射分析表明,650℃时已经基本形成了钙钛矿结构,结合原子力显微图确定薄膜的热处理温度为750℃。
作者 印志强
出处 《黑龙江科技信息》 2009年第7期4-4,6,共2页 Heilongjiang Science and Technology Information
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