皮焦级超微能电火花加工电源技术研究

Pulse power supply with pico-joule energy for micro-EDM machining

为了解决长期困扰微细电火花加工的降低单脉冲放电能量难题,对RC脉冲电源放电特性进行了试验研究.通过一系列实验证实了RC脉冲电源放电时没有电火花维持电压现象,电火花加工可以在低于常规电火花维持电压的低电压下进行,此时的单脉冲放电能量最小可达2.5×10-12J,使微细电火花单脉冲放电能量由过去的微焦耳级剧降到皮焦耳级,为实现超微能的纳米尺度电火花加工奠定了基础.在此基础上设计了一种新型可控的RC脉冲电源,并使用该电源加工出了直径仅为Φ4.5μm的微轴和直径仅为Φ8μm的微孔.

To solve the problem of decreasing single-pulse energy for micro-EDM machining, the discharge of RC power supply is investigated. The conclusion that no sparkle maintaining voltage exists during the discharge of RC power supply is confirmed by a series of experiments, and the micro-EDM can still run under the voltage which is below the conventional value. Thus the least single pulse energy is reduced to 2.5 × 10^-12 j sharply, from micro-Joule energy to pico-Joule energy, which is the basis of ultra-micro energy for nanometer EDM machining. Finally, a new type of controllable RC pulse power supply was developed. A shaft with di- ameter of 4.5 μm and a hole with diameter of 8 p.m are machined by the power supply.