硬磁盘基片研磨中修盘工艺磨削轨迹分析及优化

On the Analysis and Optimization of Wear Track of Grinding Stone Dressing Process for Computer Hard Drive Disk Substrate

为提高硬磁盘基片平面研磨的加工品质,利用计算机仿真对其研磨盘的修盘工艺进行运动学模拟,通过统计修盘器磨片相对研磨盘所划出的轨迹分布,提出了轨迹密度的概念,通过实验证明,轨迹密度可以表征修盘后研磨盘的大致形貌。通过对修盘转速配比和修盘器结构的优化,实现了均匀的轨迹密度分布。

To improve the quality of the disk substrate, the dressing process was analyzed and optimized by the computer simulation. Based on the kinematical model of the planet lapping machine, the distribution of the dresser tracks was numerically simulated, and the concept of track density was put forward. As the result of the experiment, the track density can characterize the profile of the grinding stone after the dressing process. By the optimization of the grinding stone process motion and the structure, the uniform track density distribution is achieved.