摘要
针对短波CMT红外光导探测器出现的拖尾问题,找到其拖尾的原因:过渡电极的功函数过大。为此,在原来Cr/Au电极的基础上,提出了In/Au+Cr/Au电极初步解决了拖尾问题,但是在工艺上出现了In聚球现象,影响器件的稳定性。又提出Ti/Au电极,比较好的解决了拖尾问题和In/Au+Cr/Au电极带来的工艺问题。
Aim at it appear problem of dragged cauda, that is the shortwave band CMT infrared photoconductive detector, The cause of discovered its dragged cauda: the work function of transitional electrode is over high. At the basic of original Cr/Au electrode, we bring forward In/Au+Cr/Au electrode, it solves the problem of dragged cauda, but appear the phenomenon of congregated In ball at the technics, effect the stability of detector. Bring forward Ti/Au electrode, it solves the problem of dragged cauda, and In/Au+Cr/Au electrode bring the problem of technics.
出处
《红外技术》
CSCD
北大核心
2009年第2期84-86,94,共4页
Infrared Technology