摘要
提出了一种基于系统模型的快速退火炉温度控制方法。首先采用分段线性化方法和系统辨识方法获得精确的快速退火炉系统模型;然后将该系统模型作为温度控制器的前馈控制,用来提前预测控制输出,提高系统的响应速度,并在此基础上增加反馈控制通道,用来修正模型误差和外界干扰。最后,将此温度控制器应用在我们自主研发的快速退火炉系统上,实验验证了此温度控制器的有效性。
A model-based temperature control method for rapid thermal processor system is presented in this paper. In order to simplify the nonlinear system model, the method of subsection linearization for system modeling was applied. The parameters of the model were got by a method of system identification. The controller is combined feed forward and feedback mechanisms. The feed forward mechanism is used to calculate a prediction of output of the system, so it can improve responding rapidity of control system. The feedback mechanism is used to compensate for modeling errors and disturbance. The controller has been implemented and evaluated by simulation as well as experimental equipment.
出处
《激光与红外》
CAS
CSCD
北大核心
2009年第2期197-200,共4页
Laser & Infrared
关键词
系统模型
系统辨识
温度控制器
前馈控制
反馈控制
system modal
system identification
temperature controller
feedforward control
feedback control
