摘要
介绍了一种亚激压入位移标定的简易方法,该方法采用球形压头,在弹性变形范围内加载,通过对9组标准块规厚度差的测量,对亚微压入仪的电测位移值进行校正.实验精度为19nm,不确定度为7nm.其特点是检测方便,实验精度高,与光干涉法相当.
In the paper, a new method of the displacement calibration of sub-micro indenter is introduced. Spherical indenter and nine groups of standard samples were used. The samples were loaded in the scope of elastic deformation. By testing the thickness differences of standard samples the displacement of the indenter was calibrat-ed. The accuracy of this method is 19nm and the uncertainty is 7nm. The merits of this method are convenience for operating and high accuracy of test.
出处
《理化检验（物理分册）》
CAS
1998年第5期23-25,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
基金
国家教委优秀青年教师基金资助项目
