双金属热致动器的设计与仿真

Design and Simulation of Bimetallic Thermal Actuation

双金属热致动器通过加热使得驱动元件本身的温度升高,结构内部产生热应力,导致薄膜产生线性应变,从而达到驱动目的.分析了双金属热致动原理,经过理论建模与matlab软件仿真,给出了双金属片的形变位移与悬臂梁长度、结构厚度、两种材料热膨胀系数差、温度变化量以及材料弹性模量与悬臂梁宽度的具体关系,根据仿真结果,后两者的变化对其形变大小影响不大.所得结论为双金属热致动器的设计提供了详细的理论依据.

Duplex metal thermal actuator raises the temperature of its driving structure by heating, and the film generates linearity strain due to the thermal stress of the structure, and then the structure is driven. The principle of the duplex metal actuator is presented. After simulated by Matlab and theoretically modeled, it indicates the relation between the deforming of duplex metal and some factors including the length of cantilever, the thickness of the structure, the difference of CTE between two materials, the change of temperature and the width of cantilever. The simulation result shows that the effect of the last two factors is little, which provides detailed theory to the design of duplex metal actuator.