亚微米投影光刻物镜光学制造技术

Optical fabrication technology of sub micro lithography lens

本文报告亚微米光刻５倍ｇ线与ｉ线投影光刻物镜的光学制造技术。讨论超高精度要求的球面曲率半径、透镜中心厚度、球面面形与透镜偏心差等各项指标的综合控制技术与检测方法。着重介绍了作者所发展的大口径高精度双胶合透镜的计算机辅助无变形胶合技术。给出了加工检测结果以及镜头的主要性能指标。

Optical manufacture technology for sub micro photolithographic lenses of g line and i line are reported. The overall control and test technology for spherical radius of curvature, central thickness, surface accuracy anddecentring error of lenses have been discussed. The computer aid undeformation cementing gtechnology for large aperture high precision achromatic lenses developed by the authors arre introduced emphatically. The results of manufacture and test as well the lens performance are given.