亚微米(i线和g线)投影光刻物镜的光学装校

Optical assembly and rectification of sub micro (i line and g line) photolithographic lenses

本文列出了ｉ线和ｇ线大数值孔径亚微米投影光刻物镜的技术指标要求，讨论了这类超高精度光刻物镜的光学装校技术特点，报告了计算机辅助高精度复杂光学系统偏心校正仪器和方法，最后给出了ｉ线和ｇ线光刻物镜装校检测结果。

The technical specifications about large digital apperture sub micro i line and g line photolithographic lenses are listed. The key points on the optical assembly and rectification of super precision photolithographic lenses have been discussed. The computer aid measuring instrument and method for centre errors in the high performance optical system are reported. The testing results of i line and g line photolithographic lenses.