减小薄板玻璃工件研磨变形的研究

Study on reducing workpiece deformation in lapping slice glass

针对薄板玻璃刚度差，在研磨中易产生变形这一特点，探讨了减小其变形的不同方法。我们用传统的上盘法粘结固定工件进行加工，工件在下盘前面形精度较好，能满足要求（在２５ｍｍ×２５ｍｍ面积上的平面度为０．０５μｍ），但在下盘后产生的变形使其面形精度下降，在２５ｍｍ×２５ｍｍ面积上的平面度为０．２μｍ，已不能满足要求。采用真空吸附法国固定工件，消除了工件在粘结过程中由于温度变化产生的变形，而且在研磨过程中又设法减小对工件施加的压力，从而减小了工件在研磨过程中产生的变形，使加工后的工件面形与加工过程中的面形接近，这就保证了工件的面形精度。

For the property of slice glass e.g. a low stiffness easy to deform in lapping, this paper discusses the different methods to reduce deformation. We adopt tradition surface adhesive method to fix the workpiece in lapping. Before taken down from the fixture the workpiece flatness is better. It can meet the requirement (for 25mm×25mm×0.8mm, flatness is 0.05μm). After taken down from the fixture the workpiece deforms, which reduce its surface accuracy. On the area of 25mm×25mm flatness is 0.2μm, which goes beyond the requirement. We adopt vacuum adhesive method to fix the workpiece, which removes workpiece deformation in adhering because of temperature change. In lapping we also try to reduce pressure on the workpiece, which reduces workpiece deformation in lapping and makes workpiece flatness after lapping near to that in lapping. Thus workpiece surface flatness is assured and requirement is met.