基于CCD的石英玻璃管壁厚在线检测系统研究

Research on On-Line Inspecting System in Thickness of Quartz Glass Tube Based on CCD

提出了一种用于石英玻璃管壁厚非接触测量的光电检测技术,研制了石英玻璃管壁厚在线检测系统。在确定检测总体方案的基础上,进行了石英玻璃管厚度检测原理、发射光学系统、CCD器件选择和数据处理系统的研究。根据几何光学中反射与折射定律,利用三角关系建立了石英玻璃管壁厚和光束宽度之间的关系。对实验结果进行了误差分析,验证了方案的可行性,系统测量精度优于±0.01 mm。系统调试和实际测量结果表明,研制的系统满足在线非接触测量要求。

Based on CCD characteristic which is self-scanned, high-resolution, high-sensitivity and stabilization, a non-contact photoelectric inspection technology used to measure the thickness of quartz glass tube is presented. And an on-line inspection system in the thickness of quartz glass tube is developed. Furthermore, based on the inspection general scheme, the measurement theory of the thickness of quartz glass tube, transmitting optical system, selection of CCD devices and data processing system are also studied. According to the law of reflection and refraction in the geometrical optics, the relationship between the thickness H of quartz glass tube and the beam width h is set up by using triangular relationship. Finally, the analysis of the measurement error in the experimental results validates the scheme is feasible. The measurement accuracy excelled ±0. 01 mm. The system debugging and actual measurement results show that the system meets the requirement of on-line and non-contact photoelectric inspection.