静电梳齿驱动器静电-结构耦合的仿真分析

Analysis and simulation of comb-drive electrostatic structure coupled field

采用降阶建模为静电梳齿驱动执行器开发了一个二维有限元模型,将梳齿驱动器简化为一组等价的集总参数单元,各单元均体现了对应器件的静动态特性和输入输出特性,降阶得到的模型降低了计算的复杂程度,提高了计算的速度.对采用降阶模型法所建立的模型仿真,得出梳齿驱动执行器的驱动位移、静电力与结构参数和所施加电压关系的仿真结果.该方法能以较快的速度求解静电-结构耦合问题,所得结果与有限元解相比较,最大位移误差小于5%.

A 2D finite element model using reduced order modeling principles for lateral electrostatic comb-drive actuator was proposed, and its coupled field was analyzed. This technique could reduce the comb-drive to a group of equivalent lumped parameters finite elements, which capture the input and output device behavior and its static and＇dynamic characteristics. The complexity of reduced order model was reduced to a great extent and computing time is decreased. The problem of the strongly coupled field is effectively solved by reduced order modeling. The relation between structure parameters and the electrostatic force and the displacement was discussed. Simulation results were validated using a finite element method, which is not reduced, both methods give very similar results, the maximum displacement error is less than 5 %.