酸催化制备溶胶-凝胶ZrO_2薄膜及性能

Preparation and Characterization of ZrO_2 Thin Film by Sol-Gel Method

以Zr(OC_3H_7)_4为前驱体,乙酰丙酮为络合剂,在盐酸的酸性条件下,于乙醇溶剂中水解制备ZrO_2溶胶。采用粘度、红外(IR)光谱、折射率、热分析(DSC)、原子力显微镜(AFM)等测试手段对溶胶和薄膜性能进行表征。结果表明,制备的ZrO_2溶胶具有比较好的粘度稳定性,加入聚乙烯吡喏烷酮(PVP)对溶胶稳定性影响不大;经500℃热处理后,膜层折射率可达1.91;薄膜表面均匀平整;加入PVP能提高膜层的激光损伤阈值(LIDT),ZrO_2膜的激光损伤阈值为19.6 J/cm^2(1064 nm,1 ns),ZrO_2-PVP膜的激光损伤阈值为23.3 J/cm^2(1064 nm,1 ns)。

ZrO2 sol was prepared by sol-gel process from a solution containing zirconium n-propoxide as precursor, hydrochloric acid, PVP and acetylacetone as complexing agent in ethanol. The characterization of ZrO2 sol and films was analyzed by viscosity, infrared （IR） spectroscopy, refractive index, differential scanning calorimetry （DSC） and atomic force microscopy （AFM）. The results show that the ZrO2 sol has a good viscosity stability. The influence of PVP on sol-gel stability is little. The refractive index of coatings treated at 500 ℃ is 1.91. The morphology of coatings surface is smooth. The laser induced damage threshold （LIDT） of coating is improved by adding PVP from 19.6 J/cm^2 （1064 nm, 1 ns） to 23.3 J/cm^2 （1064 nm, 1 ns）.