摘要
A novel grating light modulator for projection display is introduced. It consists of an upper moveable grating, a bottom mirror, and four supporting posts between them. The moveable grating and the bottom mirror compose a phase grating whose phase difference is controlled by the actuating voltage. When the phase difference is 2kπ, the grating light modulator will switch the incident light to zero-order diffraction; when the phase difference is （2k - 1）π, the grating light modulator will diffract light to first-order diffraction. A 16 × 16 modulator array is fabricated by the surface micromachining technology. The device works well when it is actuated by a voltage with 1-kHz frequency and 10-V amplitude. The fabricated grating light modulator can show blackness and brightness when controlled by the voltage. This modulator has potential applications in projection display system.
A novel grating light modulator for projection display is introduced. It consists of an upper moveable grating, a bottom mirror, and four supporting posts between them. The moveable grating and the bottom mirror compose a phase grating whose phase difference is controlled by the actuating voltage. When the phase difference is 2kπ, the grating light modulator will switch the incident light to zero-order diffraction; when the phase difference is （2k - 1）π, the grating light modulator will diffract light to first-order diffraction. A 16 × 16 modulator array is fabricated by the surface micromachining technology. The device works well when it is actuated by a voltage with 1-kHz frequency and 10-V amplitude. The fabricated grating light modulator can show blackness and brightness when controlled by the voltage. This modulator has potential applications in projection display system.
基金
supported by the Academician Foundation of Chongqing Municipality under Grant No. 8883
