吸气材料的研究现状及进展

Research Status and Development of Getter Materials

简要阐述了吸气材料的重要性及发展现状,并从获得吸气材料活性表面的两种不同方式,综述了蒸散型吸气剂和非蒸散型吸气剂的吸气理论和应用研究情况,并着重介绍了新型钛基非蒸散型吸气剂的发展现状和应用前景。

In this paper the significance and modem development of getter materials are presented. The recent applications and their absorption mechanisms of both evaporable and non-evaporable getter are also discussed. The development status and application prospect of Ti base non-evaporable getter are introduced.