用有限元法对原子力显微镜力传感器结构优化的研究

Investigation of Structural Optimization of the Force Sensor for the Atomic Force Microscope with the Finite Element Analysis

应用有限元法对原子力显微镜（ＡＦＭ）力传感器进行了力学分析，并计算了它的固有频率和力弹性常数。在此基础上，对力传感器基于减小应力和应力集中的原则提出了一种优化结构，并得出了可以作为力传感器设计的依据和原则。

In this paper,the mechanical analysis is carried out for the force sensor in AFM with the Finite Element Analysis.The resonant frequency and force constant are also calculated.In addition,the structural optimization of the force sensor is developed.Consequently,a better structure of the cantilever with V shape based on slighter stree concentration is recommended.Some helpful principles that can be used to guide the design are presented.