线性调频半导体激光器实现大尺寸静态、动态测距

Research on static and dynamic interferometric measurement for large scale workpiece using a frequency triangulated laser diode

提高大型机电设备的加工水平，动态在线测量是关键。将线性调频半导体激光器应用于动态测量，对目标的位置及移动的速度、加速度等实现准实时测量，可对加工过程实现动态补偿；依靠系统的自校准，消除半导体激光器的老化对激光波长的影响，使得测量精度得以保证，进而使其实用化成为可能；待测的参数是拍频的频率，即测量精度与半导体激光器的输出光功率无关，加之频率是数字量，便于和微机相连组成自动测控系统。系统静态相对测量精度为３×１０－４。整个测量系统体积小、结构简单，便于实现生产和现场安装，可广泛应用于大型机电设备的静态、动态测量。

Dynamic measurement is the key issue on improving the quality of large workpiece processing. Based on absolute distance interferometer using a frequency triangulated laser diode, an dynamic measurement system is developed. It can measure the position, velocity and accelerator of the interested object online and then makes it possible for compensating the processing of workpiece. The auto calibration of the system can eliminate the wavelength shift of the laser diode caused by ageing, which guarantees the high precision. Moreover, the system converts the measurand into another parameter, i.e.frequency, which is irrelevant to the variation of the laser power. The static measurement accuracy approaches to 3×10 -4 .All these features make the system much more practical in static and dynamic measurement of large workpiece.