308nm激光作用下V_2O_5非晶薄膜的变异

VARIATION OF THE CHARACTERISTICS OF V 2O 5 AMORPHOUS FILM WITH 308nm UV LASER

研究了在３０８ｎｍ准分子激光辐照下，Ｖ２Ｏ５非晶薄膜性质的变化．利用Ｘ射线衍射、Ｘ射线光电子能谱及扫描电子显微镜等多种测试方法进行了分析比较，确定Ｖ２Ｏ５非晶薄膜性质的变化是由于高功率密度的准分子激光作用，造成Ｖ２Ｏ５薄膜的快速升温熔化和快速冷凝重构，使其中的氧产生缺位，引起化学配比偏离所致．

Abstract Its electric conductivity,spectral transmisivity and color change markly when V 2O 5 amorphous film is irradited by 308nm laser pulse if the fluence is over the threshold.The films before and after being irradited is surveyed with XRD,XPS and SEM methods, etc.It can be determined that the change of the film is due to irradiation by high fluence excimer laser pulse,the film temperature rises and melts quickly,and then the temperature lowers and the film resolidifies quickly.The quick melting and resolidifying procedure leads to oxygen deficiency in the film,so its stoichiometry changes.