溶胶-凝胶法制备高强度二氧化硅增透膜的研究

Study on the Strengthened Antireflective Coatings Prepared from Sol Gel Process

以正硅酸乙酯（ＴＥＯＳ）为原料，用溶胶－凝胶（ＳＯＬ－ＧＥＬ）法在碱性催化条件下制备二氧化硅膜，经氨气氛和热处理工艺，提高了二氧化硅增透膜的抗擦拭和抗氙灯辐照能力，可用于激光器泵浦光学元件的增透。在５７０～８００ｎｍ范围内，双面涂膜的Ｋ９玻璃的平均透过率可提高到９８％以上。

High antireflective coatings were dip coated by sol gel method with tetraethylorthosilicate (TEOS) as precursor and ammonia as catalyst. Base heat treatment was used to strengthen the coatings. The strengthened coatings possess remarkable abrasive/scratch and irradiative resistance. The coatings can be used on the optical pumping elements in high power laser system. The obtained average transmittance of the coatings within 570￣800 nm band can be increased up to more than 98%.