摘要
在综述现有的测量薄膜(涂层)材料本征硬度方法及模型的基础上,采用超显微硬度仪对不同基体经不同工艺条件沉积的类金刚石碳膜的复合硬度进行了测量,并借助有限元模型得到的经验公式对测量数据进行拟合处理,得出了各种类金刚石碳膜的本征硬度。硬质合金基体上类金刚石碳膜本征硬度为20GPa,硅基体上经不同工艺条件沉积的类金刚石碳膜本征硬度在20～30GPa范围。在对膜/基复合体系进行Meyer定律修正的基础上,首次提出了一种简易获得类金刚石碳膜本征硬度的方法。
The composite hardness of DLC (Diamond-Like Carbon) films deposited on different substrates under various process conditions has been measured by using microhardness tester on the basis of reviewing the methods and models available to evaluate the hardness of thin film or coating materials. The intrinsic hardness of various DLC films has been obtained through fit treatments of measured date by means of the empirical equation derived from FEM (Finite Element Model), The intrinsic hardness of DLC film/cemented carbide composite system is about 20GPa, the intrinsic hardness of DLC films deposited on silicon substrates under various process parameters is between 20~30GPa. A simple technique to obtain the intrinsic hardness of DLC films has been firstly proposed on the basis of using the Meyer law to modify the film/substrate composite system.
出处
《理化检验（物理分册）》
CAS
1998年第2期5-9,共5页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
