摘要
研究了恒流激励条件下批量温度补偿的方法.零点的温度补偿是通过在桥臂上并联阻值较大且恒定的电阻来实现的,而灵敏度的温度补偿则是在整个桥臂上并联阻值较小且恒定的电阻来实现的,补偿后零点温漂为0.004%～0.015%FSO/℃,灵敏度温漂为0.0035%～0.024%FSO/℃,这表明这种补偿方法具有良好的效果.
A method of batch temperature compensation is researched. The zero point temperature compensation is realized by paralleling a big and consistent resistant in a bridge arm, and the sensitive temperature compensation is realized by paralleling a small and consistent resistant in whole bridge arm. The zero point temperature drifts are the 0. 004% -0. 015% FSO/℃, and the sensitivity temperature drifts are the 0. 003 5%-0. 024 %FSO/℃ after the compensation. These results demonstrate that the compensation method has a very good effect.
出处
《河南师范大学学报（自然科学版）》
CAS
CSCD
北大核心
2009年第1期70-73,共4页
Journal of Henan Normal University(Natural Science Edition)
基金
国家"863"计划MEMS重大专项(2004AA404221)
河南省科技攻关计划项目(0624220036)
关键词
MEMS
压力传感器
温度补偿
MEMS
pressure sensor
temperature compensation
