产生任意波形信号的系统及其在标准微位移发生装置中的应用研究

A Study of Universal Wave Generator and Its Application in the Standard Micro - displacement Generator

描述了能够产生任意波形信号的信号发生系统的构成、工作原理和关键技术，并将能产生任意波形信号的标准信号发生系统应用于标准微位移发生装置中，控制标准微位移发生装置产生任意形状的标准微位移运动轨迹及模拟标准器形状轮廓轨迹，以实现对微米测量范围的位移传感器的动态校准。通过实验验证了该系统及标准微位移发生装置的准确性及实用性。

An universal wave generator that can generate the various wave forms is developed for a standard micro - displacement generator. The principle, structure and the key techniques of the wave generator are described. The universal wave generator can control the standard micro - displacement generator to produce various movement traces of standard displacement or the form of the artifacts used to calibrate the sensors, and it is applied in standard micro- displacement generator to calibrate the dynamic characteristics of the displacement sensors with μm measuring range. The accuracy and practicability of the standard micro - displacement generator with the wave generator is verified by the calibration experiments of the actual displacement sensors.