摘要
使用量块对高精度光学计、比较仪、测微仪进行检定或校准时，其溯源标准量块长度的不确定度会带来很大的影响，而现在通常使用的“配对法”又存在一些问题。经过分析研究和测试试验，提出了一种减小溯源标准（即量块长度差）不确定度的新方法。用量块干涉仪直接测量两个量块的中心长度差，其测量结果的不确定度能够减小到0．01μm以下，从而可以满足高精度比较仪的溯源要求。
The measurement uncertainty of the gauge blocks is a problem in the traeiability and calibration of high precision comparators. The some problems are also existed in ＂pairing method＂. So the reduction of measurement uncertainty of length differencfe of a pair of gauge blocks is essential. The length difference of a pair of gauge blocks by gauge block interferometer is measured. A pair of gauge blocks was wrung on one optical flat. Measurement uncertainty of length difference of a pair of gauge blocks is reduced to less than 0.01 μm.
出处
《计量学报》
CSCD
北大核心
2008年第B09期154-156,共3页
Acta Metrologica Sinica
关键词
计量学
量块
示值误差
比较仪
不确定度
Metrology
Gauge block
Indication error
Comparator
Uncertainty
