全光型硅微机械流量传感器初探

Initial Approach for the All Optical Type Sillicon Micro Mechanical Flow Sensor

介绍一种新颖的全光型硅微机械流量传感器。给出该传感器结构及工作原理的理论分析，并阐述传感器样品的测试及结果。流量传感器具有带脊型波导的悬臂梁结构。悬臂梁用作器件的敏感区，而检测光束可以在脊型波导中传输。

A novel silicon micro mechanical sensor of all optical type is proposed. The theoretical analysis on structure and working principle of the sensor are presented, as well as the test and result of sample are expounded. The flow sensor has a structure of cantilever beam with ridge waveguide. The cantilever beam can be used as sensitive area of device and the probing optical beam may transmite in the ridge waveguide.