摘要
在光刻热熔成型以及电铸复制得到的微透镜阵列镍板基础上，采用静态铸塑技术，得到了高质量的ＰＭＭＡ微透镜阵列．本文介绍了静态铸塑的聚合反应理论基础、模具设计以及工艺过程．最后对微透镜阵列的复制精度进行分析，结果表明复制精度优于０．５μｍ．
PMMA microlens arrays are fabricated by the replication technology of static casting plastic,on the basis of Nickel mould plate fabricated by melting photoresist and electroforming.This paper discribes the polymerization theory about casting,design of mould and technological routine.Measurements of surface profiles show,the accuracy is better than 0.5μm.
出处
《光子学报》
EI
CAS
CSCD
1998年第3期266-269,共4页
Acta Photonica Sinica
