三电极法电阻率二维分布测量技术及其应用

Technique of three-electrode guard method to the two-dimensional distribution measurement of resistivity and its application

本文介绍了三电极保护法半绝缘砷化镓材料电阻率二维分布自动测量系统,在实际应用中,温度波动、异常数据对测量结果产生严重影响,为此我们提出了一些措施。文中给出了一些样品测量结果的统计数据(相对标准偏差,平均值)和等值图,并对这些结果进行讨论。

An automatic system for the measurement of two-dimensional distribution of resistivity of semi-insulating gallium arsenide wafer with three electrode guard method is presented in this paper. In actual application, the fluctuation of temperature and abnormal data obtained would influence the results of the measurement seriously. To solvethis, we have suggested some effective solutions. Statistical data( relative standard deviation, average) and contour maps of some samples are given and discussed.