摘要
理论分析了微通道热沉的热阻的组成,采用微机械加工技术和铜直接粘接技术(DBC)制作了冷却大功率半导体激光器列阵的5层结构的无氧铜微通道热沉;通过测试,用其封装的808 nm线阵二极管激光器准连续输出功率达38.5 W,无氧铜微通道热沉热阻为0.645℃/W,热沉的表面温度均匀性好,能有效散热,满足散热要求。
The thermal resistance of microchannel heatsink is theoretically analyzed, an Oxygen - free copper microchannel heatsink consisting of five copper sheets is designed and fabricated. By testing, the uniformity of the face temperature of the microehannel heatsink is good. and the therma resistance 1 is 0.645℃/W. the output power of the high power semiconductor diode laser linear arrays packaged with the mierochannel heatsink is 38.5W.
出处
《重庆工商大学学报(自然科学版)》
2009年第1期80-83,共4页
Journal of Chongqing Technology and Business University:Natural Science Edition
关键词
半导体激光器
微通道热沉
热阻
semiconductor laser diode arrays
microchannel heatsink
thermal resistance