摘要
介绍了一种低功率圆柱形阳极层离子源的工作特性和束流分布特性。离子源正常工作参数范围为工作电压200～1200V,放电电流0.1～1.4A,工作气压1.9×10-2～1.7×10-1Pa,气体流量5～20sccm。离子源有两个工作状态:发散状态和准直性状态。
A low power cylindrical anode layer ion source and its working characteristic, and the beam distribution are introduced. This ion source has two working states, emanative state and collimated state, and the normal parameters of this system are： working voltage 200- 1200V, discharge current 0. 1 - 1.4A, air pressure 1.9×10^-2 - 1.7×10^-1 Pa, gas flow 5 - 20sccm.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
2009年第1期92-96,共5页
Nuclear Fusion and Plasma Physics
关键词
圆柱形阳极层离子源
离子束
发散状态
准直性状态
Cylindrical
Anode layer ion source
Ion beam
Emanative state
Collimated state
