基于激光多普勒技术的微悬臂梁机械特性的测量

Measurement of mechanical characteristics of micro cantilever based on micro laser Doppler technology

介绍了一种微悬臂梁离面运动测试系统。结合显微激光多普勒技术，分析了用于间接测量微悬臂梁机械特性的方法，采用虚拟仪器技术建立控制系统，编辑器件激励和数据采集、处理软件，实现了对微悬臂梁的动态特性和杨氏模量、弹性系数等机械特性的测量。最后利用该测试系统对矩形、三角形微悬臂梁杨氏模量进行了实验研究，并计算了两种微悬臂梁的弹性系数。经实验证明，用该方法测量悬臂梁机械特性得到的弹性系数和杨氏模量误差小于7．5％。

A kind of micro-cantilever out of plane motion measuring system is expounded, based on micro laser Doppler technology. After the method of indirect measurement of microcantilever mechanical characteristics is analyzed, system software based on virtual instrument technique is designed, including driving and output power, data acquirement and data process. Then experiments about micro-cantilever dynamic characteristics, Young＇s module, elasticity coefficient and other mechanical characteristics could be done. With the system, experiments of Young＇s module of rectangle cantilever and triangle cantilever are done, and the spring constant of the two cantilevers are calculated. The experiments show that the error of Young＇s module and spring constant get by this system is less than 7. 5%.