成像光谱仪用0.4～1.1μm宽光谱分色片的研制

Broad-band dichroic beam splitter from 0.4 to 1.1μm used in airborne imaging spectrometry and instrument

分色片是成像光学系统的关键元件之一。为了满足：45。角度下使用时，0．6～1．1μm，透射率（T）大于80%；0．4-0．6μm，反射率（R）大于90％；且尤其注重0．625μm具有高透射性，0．575μm具有高反射性的使用要求，研制了应用于成像光谱仪的0．4～1．1μm宽光谱可见／近红外分色片。在设计上采用了长波通滤光膜系加匹配修饰膜系的结构；采用非规整膜系变极值波长监控的方法，实现了多层非归整膜系的镀制；使用离子辅助沉积技术，保证了膜层的可靠性，研制出符合工程使用要求的高性能分色片。

Dichroic beam splitter is one of the crucial components of the imaging system. To meet the demance such as the transmittance range is 0. 6-1.1μm （T≥80%） and the reflective range is 0. 4-0. 6μm （R≥90%） when it was used at an angle of 45 degree. Especially, a high transmittance in channel 0. 625μm and a high reflectance in channel 0. 575μm are concerned at the same time. A broad-band dichroic beam splitter from 0. 4 to 1. 1μm used in airborne imaging spectrometry and instrument was developed in this paper. A structure with a long wavelength passband filter plusing a matching layer was adopted in the coating design. A multilayer system was realized by using turning value monitoring method and ion beam assisted deposition. The performance and the durability can all meet the using demand of the airborne instrument.